By closing the bowl with a easy lid floor, variations and turbulence caused by the presence of operators and other gear are eradicated from the spin process.
The acceleration of the substrate in the path of the final spin pace can also affect the coated film properties. Since the resin begins to dry during the first a half of the spin cycle, it is important to accurately management acceleration. In some processes, 50% of the solvents in the resin shall be lost …